PIEZO NANO POSITIONING
H-850 6-Axis Hexapod
For Loads of up to 250 kg
Load capacity to 250 kg
Repeatability to ¡¾0.2 µm
Travel ranges to 100 mm / 60¡Æ
Actuator resolution to 5 nm
MTBF 20,000 h
Works in any orientation
Linear and rotary multi-axis scans
Vacuum-compatible versions available
Sophisticated controller using vector algorithms, virtual pivot point
Extensive software support
